MEMS (Micro-Electro-Mechanical Systems) technology integrates miniature mechanical components, sensors, actuators, and electronic circuits onto a single chip. Utilizing microfabrication processes, MEMS technology creates micro-scale mechanical structures and electronic components capable of sensing, controlling, and processing functions. By combining microelectronics and mechanical engineering, MEMS technology operates at the nanoscale to detect and manipulate physical phenomena and chemical reactions, with applications across consumer electronics, automotive, healthcare, communications, and many other fields.
Basic
Principles of MEMS Technology
MEMS devices typically consist of miniaturized mechanical
structures, sensors, actuators, and electronic circuits, operating based on the
following principles:
1.Micro-Mechanical Structures: MEMS devices include tiny
mechanical structures like cantilevers, membranes, and springs, which respond
to or interact with changes in the external environment.
2.Micro-Sensors: MEMS sensors detect external physical
quantities (such as acceleration, pressure, temperature, humidity) and convert
these signals into electrical outputs.
3.Actuators: MEMS actuators apply control actions to the
environment. For example, using miniature motors or electromagnetic structures,
actuators can generate precise movements or forces.
4.Microelectronics Circuits: MEMS processing circuits
manage the detection and transmission of signals, enabling the device to
communicate with external systems.